† Corresponding author. E-mail:
Based on the practical situation of nondestructive examination, the calculation model of the composite scattering is established by using a three-dimensional half-space finite difference time domain, and the Monte Carlo method is used to solve the problem of the optical surface with roughness in the proposed scheme. Moreover, the defect particles are observed as periodic particles for a more complex situation. In order to obtain the scattering contribution of defects inside the optical surface, a difference radar cross section is added into the model to analyze the selected calculations on the effects of numbers, separation distances, different depths and different materials of defects. The effects of different incident angles are also discussed. The numerical results are analyzed in detail to demonstrate the best position to find the defects in the optical surface by detecting in steps of a fixed degree for the incident angle.
The quality of the optical surface plays a crucial role in determining the properties of the optical system. The requirements of industry mean people must provide more effective methods to test the quality of the optical surface.[1–5] In the field of nondestructive examination, the optical surface is invariably observed as a surface without roughness. Research on rough surface[6,7] and the scattering properties of the half-space problem with multiple defect particles for an optical surface without roughness[8] has been discussed. It is well known that the roughness of the optical surface inevitably limits properties of the system.[9] So in order to find the defects of the optical surface timely and ensure the safety and reliability of the optical system, the optical surface must be observed as being slightly rough. Study on the scattering properties of the slightly rough optical surface with the targets is in accordance with the actual accident situation.
In the past several years, analyzing the scattering field to accurately determine the size, the shape and the material of a target has been demonstrated to be feasible, although it is complicated. A number of theoretical methods such as discrete dipole approximation[10–12] and discrete sources[13–15] method have been developed. Johnson used the method of the combination of standard grid and discrete dipole to investigate the composite electromagnetic scattering properties between two-dimensional (2D) rough surface and three-dimensional (3D) objects above/below the rough surface.[16] El-Shenawee used the steepest descent fast multipole method to investigate the electromagnetic scattering properties of the 2D layered rough surface with/without targets.[17] Hu and Chew used the non-uniform fast plane wave method to investigate the scattering properties between rough surface and 3D complex targets.[18] Fung et al. investigated the scattering properties of a rough surface by using a Gauss window function.[19] Moss et al.[20] used the three-wave method to study the electromagnetic scattering properties between a non-uniform rough surface and inside conductor. Li et al.[21] investigated the fast forward computation of a 3D perfect electric conductor (PEC) target in a 2D dielectric rough surface. A hybrid method based on the reciprocity theorem and the forward–backward method[22] has been used to solve the scattering of rough surface with a 2D target. The composite electromagnetic scattering by a ship-like target on the randomly rough sea surface also have been discussed by using the finite difference time domain (FDTD) method.[23–27] Although a lot of effort has been devoted to investigating the composite scattering between rough surface and target, there are very few composite scattering researches of the rough surface with more targets in laser wavelengths, especially in the case that there are periodic defect particles inside the optical surface. Light scattering is a powerful tool for controlling the optical surface quality. Investigation of light scattering by an optical surface through computer simulation is a reliable tool for investigating the properties and functional abilities of an optical system by defect particles with the optical surface.[28]
With the development of optical nondestructive examination, the size of the defect particle is generally observed to be on the order of micronmeter or submicronmeter.[29] So the scattering contribution of a slightly rough optical surface in the detection of the scattering intensity plays a crucial role, and the scattering contribution of defect particles is less. Only when the illumination width of incident wave is small, can the scattering contribution of the defect particles be valid.[30] In order to eliminate these uncertainties of the numerical results, the research on difference scattering field has been conducted. Johnson[31] first proposed the concept of the difference scattering field which calculates the scattering fields of a rough surface with and without the targets, and uses the difference between these two scattering fields to obtain the difference radar cross section (RCS). In this paper, we establish a half-space FDTD model into which the difference scattering field is added for analyzing the composite scattering properties. The primary purpose of this paper is to investigate the properties of the defect particles inside the optical surface and provide a theoretical basis for the nondestructive examination to find the defects reliably. The main schematic of the investigation in this paper is shown in Fig.
In this paper, the half-space model of a slightly rough optical surface with the targets is of a 3D structure. According to the theory of 3D FDTD, the basic iterative equation of an electromagnetic field can be expressed as
The above is the formula of an electric field in 3D FDTD. The formula of a magnetic field can also be obtained as follows:
The meanings of the specific parameters in Eqs. (
In order to obtain the difference scattering field, the scattering by a slightly rough optical surface must be obtained by using the FDTD method with Eqs. (
From Eqs. (
In this paper, the slightly rough optical surface is simulated by the Monte Carlo method. Assuming that the proportion of the rough surface is S, in x and y directions, and the sample intervals are equal, the height of each (x, y) is[32]
In the above formula
In this paper, the rough surface is of 3D structure. From Eq. (
In this paper established is the composite scattering model of the slightly rough optical surface with targets by using the half-space FDTD method, which is different from the usual FDTD method and the three-wave method.[20] The calculation model is shown in Fig.
Figure
In order to prove the correctness of the calculation model which is established in this paper, the result of the calculation model is compared with the result which is obtained by using Kirchhoff approximation (KA).[33,34] For simulation, PEC is chosen as the rough surface. The size of the discrete grid in the FDTD method is λ/10 where λ is the incident wavelength whose value is 0.3 m. The correlation lengths
Figure
Figure
Figure
In order to investigate the properties of the periodic defect particles inside the slightly rough optical surface expediently, in Fig.
In Fig.
Figure
Next, the main emphasis is placed on the investigation of the difference scattering field. The study of the difference scattering field of the periodic defect particles can help us investigate the composite scattering properties better to provide a more useful theoretical basis for nondestructive examination. In the following calculations, all parameters are the same as those used in Fig.
Figure
In this paper, the incident angle can be arbitrary. The best incident angle to test the quality of the optical surface is very crucial. A comparison of Fig.
As is well known, the defect particles with different positions and separations have different scattering properties. In Fig.
Figure
Figure
In this work, the half-space FDTD model is established to investigate the properties between a slightly rough optical surface and defect particles. The accuracy of the calculation model is verified by comparing with that given by KA. This model is better than the other methods because it has a wide range of applications. In order to investigate the properties of the defects better, the theory of difference scattering field and roughness is added into the calculation model of half-space FDTD to mainly discuss the periodic defect particles inside the slightly rough optical surface. The effects of various cases on the results are investigated in detail, which provide a theoretical basis for the nondestructive examination to find the defects quickly and reliably. The results indicate that first, the difference scattering field can be used to analyze the scattering properties better, second, for detecting the periodic defect particles, the incident angle of 20° is chosen as the best incident angle and the NRCS can be measured with an interval of fixed degree for the incident angle, third, with the increase of the separation distance, the difference scattering field of the periodic defect particles will be more sensitive. Finally, in order to find the material of periodic defect particles, the detecting position can be the mirror direction for the incident angle. The results in this paper can also provide a theoretical basis for optical film, as well as for the optical performance design of nanometer structure. More investigations are still required before reaching the final goal. Improving the algorithm and considering more cases of the composite scattering will be desired in our future work.
[1] | |
[2] | |
[3] | |
[4] | |
[5] | |
[6] | |
[7] | |
[8] | |
[9] | |
[10] | |
[11] | |
[12] | |
[13] | |
[14] | |
[15] | |
[16] | |
[17] | |
[18] | |
[19] | |
[20] | |
[21] | |
[22] | |
[23] | |
[24] | |
[25] | |
[26] | |
[27] | |
[28] | |
[29] | |
[30] | |
[31] | |
[32] | |
[33] | |
[34] |